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ENEA - Fusion division

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Photolithography Laboratory

Contatti:

Dott. Ugo Besi Vetrella  - email: ugo.besivetrella@enea.it
tel. 0039 06 9400 5873- fax. 0039 06 9400 5393


Dott. Andrea Augieri - email: andrea.augieri@enea.it
tel. 0039 06 9400 5994 - fax. 0039 06 9400 5393
Captair for  evacuation of the chemical vapoursCaptair for evacuation
of the chemical vapours



The Superconductivity section is provided with a laboratory for chemical treatments of the samples and for the photolitographic processes. Chemical treatments are carried out with the aid of a captair for vapours evacuation and include the use of substances such as aceton, 2-propanol, methanol, ethanol, ferric chloride, positive and negative photoresists, developers, bromine, sulphuric acid and nitric acid. Through a ultrasonic bath and a water purification system it is possible to effect the samples cleaning while a hot plate allows samples thermal treatments.

 

In this laboratory we realize the "patterning" process of superconductor thin films through U.V. photolitography and "wet etching".

Stylus Profilometer IQ-TencorStylus Profilometer IQ-Tencor

The photolitographic processes are effected through a mask-aligner provided with an ultraviolet lamp that allows a controlled exposure of the superconducting films previously covered by resist by means of a variable-speed spinner.   The environment is constantly kept in air overpressure in order to avoid the formation and the circulation of dust particles that would be able to invalidate the quality of photolitographic processes.   The illumination of the laboratory is guaranteed by lamps with an emission spectrum centered on the yellow that doesn't have components in the ultraviolet wavelengths region.
Through a stylus profilometer it is possible to perform measurements concerning the thickness and the roughness of thin films as well as to check the quality of photolitographic processes evaluating the dimensions and the geometries obtained during the patterning process.

In the laboratory there is also an optic microscope allowing both direct and transmission illumination, with optics for the enlargement up to 80x.